1200℃ Sliding Single /Multi-Zone CVD System
- Product Description
- Technical Specifications
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Sales Hotline: 15122725930
Product用途:
This CVD system is specifically designed for thin-film deposition on metal foils, with particular applications in next-generation energy technologies involving flexible metal foils.
Research on electrodes employs a sliding furnace to achieve rapid heating and cooling.
Product Composition:
CVD system configuration:
1. 1200°C open-type vacuum tube furnace (optional single-zone and dual-zone configurations).
2. The sliding system is available in manual and electric versions and is equipped with an air-cooling system.
3. Double quartz tubes, both internal and external, with a special vacuum-compatible, atmosphere-permeable double-flange connection.
4. Multi-channel gas flow control system (proton flow controllers and rotameter flow controllers)
5. Vacuum System (optional: medium vacuum or high vacuum)
Product Features:
Product Uniqueness
1. The control circuit employs fuzzy PID programmable control technology, which offers high temperature-control accuracy, low thermal inertia, no temperature overshoot, reliable performance, and simple operation.
2. The quick-connect flange structure for the gas lines is designed in-house, enhancing operational convenience.
3. The medium-vacuum system features automatic control of vacuum level upper and lower limits, while the high-vacuum system employs a high-pressure, shock-resistant molecular pump to prevent accidental gas leaks. This can damage the molecular pump and extend the system’s service life.
4. The (electric) sliding system uses a temperature controller to automatically regulate the movement of the furnace body; once the program is complete, the furnace body slides at the set speed, with slide limiters in place. The design ensures that the furnace chamber does not experience any collisions, and once the sample is exposed, the air-cooling system rapidly reduces its temperature.
5. Double-tube vacuum-sealed flange: reactive gases can react between the inner and outer tubes, while cooling gas flows through the inner tube, thereby reducing the outer-wall temperature of the inner tube.
System Name
1200℃ Dual-Tube Sliding Single/Multi-Zone CVD System
System Model
CVD-12II6SH-3Z/G
CVD-12III9SH-3Z/G
Maximum temperature
1200℃
Heating zone length
610mm
940mm
Constant-temperature zone length
400mm
700mm
Temperature zone
Dual-temperature zone
Three-temperature zone
Quartz tube diameter
Inner pipe: Φ80mm Outer pipe: Φ100mm
Rated power
4.8Kw
7.2Kw
Rated voltage
220V
380V (three-phase)
Sliding distance
485mm
650mm
Swipe method
Manual sliding/automatic sliding (automatically controlled by the temperature controller; once the program is complete, the furnace slides at the set speed).
Temperature control
Domestically produced programmable temperature control system with 50-program sequencing;
Control accuracy
±1℃
Maximum operating temperature of the furnace tube
<1200℃
Double-pipe flange connection
The use of double-flange, double-clamp connections enhances versatility and enables independent vacuum and gas-flow control for the inner and outer tubes. A multi-ring sealing technology is employed at the interface between the sealing flange and the pipe fitting, creating a reliable seal between the sealing flange and the outer wall of the pipe; this seal remains effective even when there are significant deviations in the outer diameter of the pipe fitting. Installation of this sealing flange is required only during the initial commissioning of the equipment.
Gas control method
Mass flow meter
Number of air circuits
Route 3 (number of air circuits can be customized based on specific requirements)
Flow range
0–500 sccm (standard milliliters per minute, optional) nitrogen calibration
Accuracy
±1% F.S.
Response time
≤4sec
Operating temperature
5–45°C
Work stress
Intake pressure: 0.05–0.3 MPa (gauge pressure)
System Connection Method
Utilizes KF quick-connect bellows, a high-vacuum manual butterfly valve, and a digital vacuum gauge.
Specifications
High vacuum
System vacuum range
1x10-3Pa-1x10-1Pa
Vacuum pump
Theoretical Ultimate Vacuum of a Molecular Pump
Pumping speed: 1600 L/s at 5×10⁻⁶ Pa
Rated voltage: 220V; Power: 2kWFurnace external dimensions
480×770×605mm
410×1100×605mm
System external dimensions
530×1440×750 mm (excluding high vacuum)
Total system weight
340Kg
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Please contact customer service for the detailed technical solution!
Sales Hotline: 15122725930 (WeChat)
Email: CTJZH@CTJZH.COM
Website: WWW.CTJZH.COMContact Address: No. 11, Shuangchuan Road, Beichen Science and Technology Park, Tianjin
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Contact Us Content
Service hotline: 15122725930 (WeChat)
Email: ctjzh2828@126.com
Website: www.ctjzh.com
Contact Address: No. 11, Shuangchuan Road, Beichen Science and Technology Park, Tianjin
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Address: No. 11 Shuangchuan Road, Tianjin Beichen Science and Technology Park
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