1200℃ Dual-temperature zone CVD System
- Product Description
- Technical Specifications
- Contact Us
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Sales Hotline: 15122725930
Product用途:
This CVD growth system is suitable for a variety of CVD processes, including silicon carbide coating, electrical conductivity testing of ceramic substrates, controlled growth of ZnO nanostructures, and atmosphere sintering of multilayer ceramic capacitors (MLCCs), among others.
Product Composition:
This CVD system is configured as follows:
1. 1200°C open-type vacuum tube furnace (optional single-zone or dual-zone configuration).
2. Multi-Channel Mass Flow Control System
3. Vacuum System (optional: medium vacuum or high vacuum)
Product Features:
1. The control circuit employs fuzzy PID programmable control technology, which offers high temperature-control accuracy, low thermal inertia, no temperature overshoot, reliable performance, and simple operation.
2. The quick-connect flange structure for the gas lines is designed in-house, enhancing operational convenience.
3. The medium-vacuum system features automatic control of vacuum level upper and lower limits, while the high-vacuum system employs a high-pressure, shock-resistant molecular pump.
Prevent accidental gas leaks from damaging the molecular pump and extend the system’s service life.
System Name
1200℃ Single/Double Zone CVD System
System Model
CVD-12II-3Z/G
CVD-12II6-3Z/G
Maximum temperature
1200℃
Heating zone length
420mm
600mm
Constant-temperature zone length
280mm
390mm
Temperature zone
Dual-temperature zone
Dual-temperature zone
Quartz tube diameter
Φ50/Φ60/Φ80mm
Φ80/Φ100mm
Rated power
3.2Kw
4.8Kw
Rated voltage
220V
Temperature control
Domestically produced programmable temperature control system with 50-program sequencing;
Control accuracy
±1℃
Maximum operating temperature of the furnace tube
<1200℃
Air line flange
A multi-ring sealing technology is employed at the connection between the sealed flange and the pipe fitting, creating a seal between the sealed flange and the outer wall of the pipe. This seal remains effective even when there are significant deviations in the outer diameter of the pipe fitting. Installation of this sealed flange is required only during the initial commissioning of the equipment.
Gas control method
Mass flow meter
Number of gas lines
Route 3 (number of air circuits can be customized based on specific requirements)
Flow range
0–500 sccm (standard milliliters per minute, optional) nitrogen calibration
Accuracy
±1% F.S.
Response time
≤4sec
Operating temperature
5–45°C
Work stress
Intake pressure: 0.05–0.3 MPa (gauge pressure)
System Connection Method
Adopts KF quick-connect bellows, high-vacuum manual butterfly valves, and digital vacuum gauges.
Specifications
High vacuum
System vacuum range
1x10-3Pa-1x10-1Pa
Vacuum pump
Theoretical ultimate vacuum: 5 × 10⁻⁶ Pa; pumping speed: 1,200 L/s; rated voltage: 220 V; power: 2 kW.
Theoretical ultimate vacuum: 5 × 10⁻⁶ Pa; pumping speed: 1,600 L/s; rated voltage: 220 V; power: 2 kW.
Furnace external dimensions
340×580×555mm
480×770×605mm
System external dimensions
530 x 1440 x 750 mm (excluding high vacuum)
Total system weight
330kg
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Please contact customer service for the detailed technical solution!
Sales Hotline: 15122725930 (WeChat)
Email: CTJZH@CTJZH.COM
Website: WWW.CTJZH.COMContact Address: No. 11, Shuangchuan Road, Beichen Science and Technology Park, Tianjin
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Contact Us Content
Service hotline: 15122725930 (WeChat)
Email: ctjzh2828@126.com
Website: www.ctjzh.com
Contact Address: No. 11, Shuangchuan Road, Beichen Science and Technology Park, Tianjin
Contact Information
Address: No. 11 Shuangchuan Road, Tianjin Beichen Science and Technology Park
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