RTP – Small Rapid Annealing Furnace
- Product Description
- Technical Specifications
- Contact Us
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Sales Hotline: 15122725930
Product Applications:
This electric furnace employs infrared lamp heating and achieves rapid cooling by sliding the furnace chamber. It is used for annealing semiconductor or solar-cell substrates and can also be applied to rapid thermal annealing.
Process trials including rapid thermal oxidation, rapid thermal nitridation, silicide alloying annealing, electrode alloying, oxide growth, post-ion implantation annealing, and thin-film deposition.
Product Features:
By rapidly moving the furnace body in various environments—such as vacuum, inert atmosphere, or air—and incorporating a powerful forced-air cooling system, the sample can undergo rapid heating and cooling cycles; furthermore, an in-tube temperature measurement design is employed.
High temperature control accuracy and a maximum heating rate of 50°C/s; compact benchtop design with quick-connect flanges that minimize the risk of furnace tube damage during installation, ensuring convenient operation.
Product Name
RTP – Small Rapid Annealing Furnace
Product Model
RTP-G11103-K
Rated power
9KW
Rated voltage
220V AC 50/60 Hz
Maximum temperature
1000°C
Continuous work
950°C (<1 hour)
Heating zone length
300mm
Constant-temperature zone length
100mm
Heating element
Infrared lamp tube
Temperature control
The domestically produced programmable temperature control system supports 50 programmable temperature profiles.
Control accuracy
±1℃
Quartz tube dimensions
Φ110*380MM
Furnace tube material
Quartz tube
Sliding distance
355mm
Swipe method
Manual sliding
Recommended heating rate
Room temperature to 900℃: 30℃/sec
900℃~1000℃: 10℃/secExternal dimensions
950 x 350 x 530 mm
Weight
45Kg
Standard Configuration
One complete gas pipeline assembly (including a vacuum pressure gauge), one quartz tube, and one pair of high-temperature gloves. One 76 mm quartz sample holder.
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Please contact customer service for detailed technical solutions!
Sales Hotline: 15122725930 (WeChat)
Email: CTJZH@CTJZH.COM
Website: WWW.CTJZH.COMContact Address: No. 11, Shuangchuan Road, Beichen Science and Technology Park, Tianjin
-
Please contact customer service for the detailed technical solution!
Sales Hotline: 15122725930 (WeChat)
Email: CTJZH@CTJZH.COM
Website: WWW.CTJZH.COMContact Address: No. 11, Shuangchuan Road, Beichen Science and Technology Park, Tianjin
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