When operating a laboratory vacuum-atmosphere tube furnace, the following safety precautions must be strictly observed to ensure smooth experimental procedures and to safeguard personnel and equipment:

I. Gas Usage Safety

• Prohibition of introducing flammable and explosive gases : Such as hydrogen (H₂) and methane (CH₄), to prevent explosions or fires from occurring in high-temperature environments.
• Avoid mixing highly toxic gases. : For example, **(KCN)** must not be stored together with acids to prevent the formation of highly toxic hydrogen cyanide (HCN) gas.
• Gas Handling After the Experiment : If no further use is anticipated, the specialty gas supply shall be shut off, nitrogen (N₂) flow shall be maintained, and the furnace tube shall be held at the standby temperature.

II. Temperature and Load Control

• Over-temperature operation is strictly prohibited. : The operating temperature must not exceed the equipment’s rated maximum, to prevent overheating and damage to the heating elements or deformation of the furnace chamber.
• Avoid overuse : The charge size should not be excessive; otherwise, heating uniformity will be compromised, leading to deviations in the experimental results.
• Do not open the door during heating or cooling. : Prevent sudden cooling or heating of the furnace chamber to avoid furnace rupture or burns to operating personnel.

III. Operating Procedures and Personnel Safety

• Unauthorized departure from post is prohibited. : During the heating process, operators must not leave their posts for extended periods to prevent unattended handling of sudden malfunctions.
• Only authorized personnel are permitted to operate the equipment. : Prevent safety accidents caused by operator error.
• Wear protective equipment : During operation, wear fire- and static-resistant clothing, high-temperature-resistant gloves, safety goggles, and other protective equipment to avoid direct contact with hot components.

IV. Electrical and Equipment Safety

• Regularly inspect the electrical system. : Includes power cords, switches, grounding wires, etc., ensuring there is no aging or damage.
• Keep the equipment clean. : If there is dust or dirt inside the furnace, wipe it clean with a silk cloth dampened with alcohol or gasoline and then allow it to dry; after disassembling the sealing components, clean them with aviation gasoline or alcohol, dry them thoroughly, apply vacuum grease, and then reinstall.
• Operate after cooling. : After the experiment is completed, wait until the furnace has cooled to a safe temperature before performing any operations or maintenance.

V. Emergency Response and Environmental Management

• Avoid inhaling harmful gases. : During the experiment, avoid inhaling gases emitted from the furnace or processing tank; it is recommended to conduct the operation in a well-ventilated environment.
• Preventing In-Furnace Contamination : Quartz glass products should be handled with care to prevent breakage and resulting lacerations; when loading or unloading wafers, the holder must not come into contact with the furnace tube opening to avoid contaminating the tube.

Summary

The safe operation of laboratory vacuum-atmosphere tube furnaces involves multiple aspects, including gas management, temperature control, electrical safety, operational procedures, and environmental protection. Only by strictly adhering to operating procedures and maintenance requirements can the efficiency and safety of experiments be ensured.

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